Effect of post-deposition annealing on the structural, optical and electrical properties of IGZO films
- 期刊名称Electronic Materials Letters
- 作者Jeon, Jae-Hyun; Gong, Tae-Kyung; Kong, Young-Min; Lee, Hak Min; Kim, Daeil
- 卷第11卷
- 期第3期
- 印刷ISSN1738-8090
- 电子ISSN2093-6788
- 文件大小836.05KB
- 发表时间2015-5
- DOI10.1007/s13391-014-4410-1
- 页码481-484
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