Atomic force microscope caliper for critical dimension measurements of micro and nanostructures through sidewall scanning
- 期刊名称Ultramicroscopy
- 作者Xie, Hui; Hussain, Danish; Yang, Feng; Sun, Lining
- 卷第158卷
- 印刷ISSN0304-3991
- 文件大小3637.23KB
- 发表时间2015-11
- DOI10.1016/j.ultramic.2015.06.007
- 页码8-16
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