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Two-dimensional simulation of the silicon nanowires thinning effect during the thermal oxidation

Two-dimensional simulation of the silicon nanowires thinning effect during the thermal oxidation

S. V. Kalinin; A. V. Egorkin

作者S. V. Kalinin; A. V. Egorkin
文件大小800.80KB
发表时间2015
DOI10.1109/EDM.2015.7184479

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