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Secondary ion mass spectrometry round-robin study of relative sensitivity factors in gallium arsenideHomma, Y.; Tohjou, F.; Masamoto, A.; Shibata, M.; Shichi, H.; Yoshioka, Y.; Adachi, T.; Akai, T.; Gao, Y.; Hirano, M.; Hirano, T.; Ihara, A.; Kamejima, T.; Koyama, H.; Maier, M.; Matsumoto, S.; Matsunaga, H.; Nakamura, T.; Obata, T.; Okuno, K.; Sadayama, S.; Sasa, K.; Sasakawa, K.; Shimanuki, Y.; Suzuki, S.; Sykes, D. E.; Tachikawa, I.; Takase, H.; Tanigaki, T.; Tomita, M.; Tosho, H.; Kurosawa, S. · Surface and Interface Analysis · 1998