Nitrogen Atmospheric-Pressure-Plasma-Jet Induced Oxidation of SnOxThin Films
Lin, Guan-Wei; Jiang, Yu-Hao; Kao, Peng-Kai; Chiu, I-Chung; Wu, Yu-Han; Hsu, Cheng-Che; Cheng, I-Chun; Chen, Jian-Zhang
- 期刊名称Plasma Chemistry and Plasma Processing
- 作者Lin, Guan-Wei; Jiang, Yu-Hao; Kao, Peng-Kai; Chiu, I-Chung; Wu, Yu-Han; Hsu, Cheng-Che; Cheng, I-Chun; Chen, Jian-Zhang
- 卷第35卷
- 期第6期
- 印刷ISSN0272-4324
- 电子ISSN1572-8986
- 文件大小2343.01KB
- 发表时间2015-11
- DOI10.1007/s11090-015-9646-5
- 页码979-991