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Handbook of Silicon Based MEMS Materials and Technologies || Metallic Alloy Seal Bonding

Handbook of Silicon Based MEMS Materials and Technologies || Metallic Alloy Seal Bonding

Reinert, Wolfgang
  • 作者Reinert, Wolfgang
  • 文件大小1872.39KB
  • 发表时间2015
  • DOI10.1016/B978-0-323-29965-7.00032-4
  • 页码626-639
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