High-Speed Fabrication of Microchannels Using Line-Based Laser Induced Plasma Micromachining
- 期刊名称Journal of Micro and Nano-Manufacturing
- 作者Saxena, Ishan; Malhotra, Rajiv; Ehmann, Kornel; Cao, Jian
- 卷第3卷
- 期第2期
- 印刷ISSN2166-0468
- 文件大小2861.57KB
- 发表时间2015-06-01
- DOI10.1115/1.4029935
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