[IEEE 2015 IEEE SENSORS - Busan, South Korea (2015.11.1-2015.11.4)] 2015 IEEE SENSORS - Design and fabrication of SiO2 waveguide-based SAW sensors with filled microcavities
Li, Shuangming; Richardson, Mandek; Sankaranarayanan, Subramanian K. R. S.; Fan, Chunhai; Su, Yan; Bhethanabotla, Venkat R.
- 作者Li, Shuangming; Richardson, Mandek; Sankaranarayanan, Subramanian K. R. S.; Fan, Chunhai; Su, Yan; Bhethanabotla, Venkat R.
- 文件大小809.25KB
- 发表时间2015
- DOI10.1109/ICSENS.2015.7370217
- 页码1-4