SPIE Proceedings [SPIE Applied Optics and Photonics China (AOPC2015) - Beijing, China (Tuesday 5 May 2015)] AOPC 2015: Optical and Optoelectronic Sensing and Imaging Technology - The influence of thermal treatment on the passivation of SiN
x
film and the dark current of p-i-n InGaAs detector
Gong, Haimei; Wu, Nanjian; Ni, Yang; Chen, Weibiao; Lu, Jin; Cao, Gaoqi; Tang, Hengjing; Shao, Xiumei; Wang, Rui; Li, Qingfa; Cheng, Jifeng; Li, Tao; Li, Xue; Gong, Haimei
- 作者Gong, Haimei; Wu, Nanjian; Ni, Yang; Chen, Weibiao; Lu, Jin; Cao, Gaoqi; Tang, Hengjing; Shao, Xiumei; Wang, Rui; Li, Qingfa; Cheng, Jifeng; Li, Tao; Li, Xue; Gong, Haimei
- 卷第9674卷
- 印刷ISSN0277-786X
- 文件大小758.98KB
- 发表时间2015
- DOI10.1117/12.2199226