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[IEEE 2015 IEEE 10th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) - Xi'an, China (2015.4.7-2015.4.11)] 10th IEEE International Conference on Nano/Micro Engineered and Molecular Systems - Failure of a MEMS switch after environmental test

[IEEE 2015 IEEE 10th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) - Xi'an, China (2015.4.7-2015.4.11)] 10th IEEE International Conference on Nano/Micro Engineered and Molecular Systems - Failure of a MEMS switch after environmental test

Ding Xuran, ; Feng Yue, ; Lou Wenzhong, ; Guo Yunlong,
  • 作者Ding Xuran, ; Feng Yue, ; Lou Wenzhong, ; Guo Yunlong,
  • 文件大小572.46KB
  • 发表时间2015
  • DOI10.1109/nems.2015.7147457
  • 页码417-420
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