SPIE Proceedings [SPIE SPIE Optical Metrology - Munich, Germany (Sunday 21 June 2015)] Optical Measurement Systems for Industrial Inspection IX - Robust vertical scanning white-light interferometry in close-to-machine applications
Lehmann, Peter; Osten, Wolfgang; Albertazzi Gonçalves, Armando; Tereschenko, Stanislav; Lehmann, Peter; Gollor, Pascal; Kuehnhold, Peter
- 作者Lehmann, Peter; Osten, Wolfgang; Albertazzi Gonçalves, Armando; Tereschenko, Stanislav; Lehmann, Peter; Gollor, Pascal; Kuehnhold, Peter
- 卷第9525卷
- 印刷ISSN0277-786X
- 文件大小1154.69KB
- 发表时间2015
- DOI10.1117/12.2184024