[IEEE 2015 IEEE International Interconnect Technology Conference and 2015 IEEE Materials for Advanced Metallization Conference (IITC/MAM) - Grenoble, France (2015.5.18-2015.5.21)] 2015 IEEE International Interconnect Technology Conference and 2015 IEEE Materials for Advanced Metallization Conference (IITC/MAM) - Influence of alloying elements on the phase formation of ultrathin Ni (<10nm) on Si(001) substrates
Geenen, F. A.; Van Stiphout, K.; Jordan-Sweef, J.; Vantomme, A.; Lavoie, C.; Detavernier, C.
- 作者Geenen, F. A.; Van Stiphout, K.; Jordan-Sweef, J.; Vantomme, A.; Lavoie, C.; Detavernier, C.
- 文件大小668.03KB
- 发表时间2015
- DOI10.1109/iitc-mam.2015.7325615
- 页码183-186