DRIE process optimization to fabricate vertical silicon nanowires using gold nanoparticles as masks
- 期刊名称Advances in Natural Sciences: Nanoscience and Nanotechnology
- 作者Bui, Thanh Tung; Tu, Hoan Phuc; Dang, Mau Chien
- 卷第6卷
- 期第4期
- 电子ISSN2043-6262
- 文件大小3451.49KB
- 发表时间2015-12-07
- DOI10.1088/2043-6262/6/4/045016
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