[IEEE ESSDERC 2015 - 45th European Solid-State Device Research Conference - Graz, Austria (2015.9.14-2015.9.18)] 2015 45th European Solid State Device Research Conference (ESSDERC) - Metal gate VT modulation using PLAD N2 implants for Ge p-FinFET applications

• 作者Kothari, Shraddha; Joishi, Chandan; Vaidya, Dhirendra; Nejad, Hasan; Colombeau, Benjamin; Ganguly, Swaroop; Lodha, Saurabh
• 文件大小912.85KB
• 发表时间2015
• DOI10.1109/essderc.2015.7324753
• 页码214-217