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[IEEE 2015 IEEE 11th International Conference on ASIC (ASICON ) - Chengdu, China (2015.11.3-2015.11.6)] 2015 IEEE 11th International Conference on ASIC (ASICON) - 3D resist modeling for OPC correction and verification

[IEEE 2015 IEEE 11th International Conference on ASIC (ASICON ) - Chengdu, China (2015.11.3-2015.11.6)] 2015 IEEE 11th International Conference on ASIC (ASICON) - 3D resist modeling for OPC correction and verification

Zhu, Liang; Ren, Qian; Tan, Neo; Ai, Zhibo

作者Zhu, Liang; Ren, Qian; Tan, Neo; Ai, Zhibo
文件大小308.50KB
发表时间2015
DOI10.1109/asicon.2015.7517066
页码1-4

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