Tomographic measurement of buried interface roughness
- 期刊名称Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
- 作者Hayashida, Misa; Ogawa, Shinichi; Malac, Marek
- 卷第33卷
- 期第4期
- 印刷ISSN2166-2746
- 电子ISSN2166-2754
- 文件大小769.07KB
- 发表时间2015-07
- DOI10.1116/1.4926975
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