![The influence of Ar pressure on the structure and optical properties of non-hydrogenated a-Si thin films grown by rf magnetron sputtering onto room-temperature glass substrates]()
The influence of Ar pressure on the structure and optical properties of non-hydrogenated a-Si thin films grown by rf magnetron sputtering onto room-temperature glass substratesMárquez, E.; Saugar, E.; Díaz, J.M.; García-Vázquez, C.; Fernández-Ruano, S.M.; Blanco, E.; Ruiz-Pérez, J.J.; Minkov, D.A. · Journal of Non-Crystalline Solids · 2019