Hybrid micro electrostatic actuator
- 期刊名称Microsystem Technologies
- 作者Hailu, Zewdu; He, Siyuan; Ben Mrad, Ridha
- 卷第22卷
- 期第2期
- 印刷ISSN0946-7076
- 电子ISSN1432-1858
- 文件大小1375.29KB
- 发表时间2016-2-24
- DOI10.1007/s00542-015-2424-8
- 页码319-327
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