Postvoiding Stress Evolution in Confined Metal Lines
- 期刊名称IEEE Transactions on Device and Materials Reliability
- 作者Sukharev, Valeriy; Kteyan, Armen; Huang, Xin
- 卷第16卷
- 期第1期
- 印刷ISSN1530-4388
- 电子ISSN1558-2574
- 文件大小1384.78KB
- 发表时间2016-3
- DOI10.1109/tdmr.2015.2508447
- 页码50-60
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