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[IEEE 2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS) - Shanghai, China (2016.1.24-2016.1.28)] 2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS) - Towards multiscale fluidic channel networks via internal oxidation and oxide etching based on self-assembled silicon-on-nothing structures

[IEEE 2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS) - Shanghai, China (2016.1.24-2016.1.28)] 2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS) - Towards multiscale fluidic channel networks via internal oxidation and oxide etching based on self-assembled silicon-on-nothing structures

Song, Jungki; Je, Jinsol; Lee, Jungchul
  • 作者Song, Jungki; Je, Jinsol; Lee, Jungchul
  • 文件大小428.68KB
  • 发表时间2016
  • DOI10.1109/memsys.2016.7421675
  • 页码517-519
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