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Cut-hole layout decomposition and synthesis to reduce the effect of edge-placement errors

Cut-hole layout decomposition and synthesis to reduce the effect of edge-placement errors

Liu, Hongyi; Han, Ting; Chen, Yijian

期刊名称Microelectronic Engineering
作者Liu, Hongyi; Han, Ting; Chen, Yijian
卷第155卷
印刷ISSN0167-9317
文件大小2106.30KB
发表时间2016-04
DOI10.1016/j.mee.2016.03.048
页码107-113

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