SciFab -a wafer-level heterointegrated InP DHBT/SiGe BiCMOS foundry process for mm-wave applications

• 期刊名称physica status solidi (a)
• 作者Weimann, Nils G.; Stoppel, Dimitri; Schukfeh, Muhammed I.; Hossain, Maruf; Al-Sawaf, Thualfiqar; Janke, Bernd; Doerner, Ralf; Sinha, Siddharta; Schmückle, Franz-Josef; Krüger, Olaf; Krozer, Viktor; Heinrich, Wolfgang; Lisker, Marco; Krüger, Andreas; Datsuk, Anton; Meliani, Chafik; Tillack, Bernd
• 卷第213卷
• 期第4期
• 印刷ISSN1862-6300
• 文件大小848.09KB
• 发表时间2016-04
• DOI10.1002/pssa.201532549
• 页码909-916