Discriminative Feature Selection Based on Imbalance SVDD for Fault Detection of Semiconductor Manufacturing Processes
Wang, Jian; Feng, Jian; Han, Zhiyan
- 期刊名称Journal of Circuits, Systems and Computers
- 作者Wang, Jian; Feng, Jian; Han, Zhiyan
- 印刷ISSN0218-1266
- 电子ISSN1793-6454
- 文件大小529.11KB
- 发表时间2016-06-30
- DOI10.1142/S0218126616501437