Improved n-channel Ge gate stack performance using HfAlO high- k dielectric for various Al concentrations
- 期刊名称Applied Physics Express
- 作者Kothari, Shraddha; Joishi, Chandan; Ghosh, Sayantan; Biswas, Dipankar; Vaidya, Dhirendra; Ganguly, Swaroop; Lodha, Saurabh
- 卷第9卷
- 期第7期
- 印刷ISSN1882-0778
- 电子ISSN1882-0786
- 文件大小7919.49KB
- 发表时间2016-07-01
- DOI10.7567/APEX.9.071302
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