Titanium Nitride Hard Mask Removal with Selectivity to Tungsten in FEOL
- 期刊名称Solid State Phenomena
- 作者Wu, Hsing Chen; Tu, Sheng Hung; Yang, Min Chieh; Cooper, Emanuel
- 卷第255卷
- 电子ISSN1662-9779
- 文件大小274.47KB
- 发表时间2016-9
- DOI10.4028/www.scientific.net/SSP.255.91
- 页码91-96
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