Templated Solid-State Dewetting of Thin Silicon Films
- 期刊名称Small
- 作者Naffouti, Meher; David, Thomas; Benkouider, Abdelmalek; Favre, Luc; Delobbe, Anne; Ronda, Antoine; Berbezier, Isabelle; Abbarchi, Marco
- 印刷ISSN1613-6810
- 文件大小1897.22KB
- 发表时间2016-09
- DOI10.1002/smll.201601744
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