SPIE Proceedings [SPIE SPIE Nanoscience + Engineering - San Diego, California, United States (Sunday 28 August 2016)] Nanophotonic Materials XIII - Plasma-enhanced atomic layer deposition for plasmonic TiN
- 作者Cabrini, Stefano; Lérondel, Gilles; Schwartzberg, Adam M.; Mokari, Taleb; Otto, Lauren M.; Hammack, Aaron T.; Aloni, Shaul; Ogletree, D. Frank; Olynick, Deirdre L.; Dhuey, Scott; Stadler, Bethanie J. H.; Schwartzberg, Adam M.
- 卷第9919卷
- 印刷ISSN0277-786X
- 文件大小904.31KB
- 发表时间2016
- DOI10.1117/12.2238340
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