Eigenanalysis of morphological diversity in silicon random nanostructures formed via resist collapse
- 期刊名称Physica A: Statistical Mechanics and its Applications
- 作者Naruse, Makoto; Hoga, Morihisa; Ohyagi, Yasuyuki; Nishio, Shumpei; Tate, Naoya; Yoshida, Naoki; Matsumoto, Tsutomu
- 卷第462卷
- 印刷ISSN0378-4371
- 文件大小1733.05KB
- 发表时间2016-11
- DOI10.1016/j.physa.2016.06.140
- 页码883-888
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