A Multistep DRIE Process for Complex Terahertz Waveguide Components
Jung-Kubiak, Cecile; Reck, Theodore J.; Siles, Jose V.; Lin, Robert; Lee, Choonsup; Gill, John; Cooper, Ken; Mehdi, Imran; Chattopadhyay, Goutam
- 期刊名称IEEE Transactions on Terahertz Science and Technology
- 作者Jung-Kubiak, Cecile; Reck, Theodore J.; Siles, Jose V.; Lin, Robert; Lee, Choonsup; Gill, John; Cooper, Ken; Mehdi, Imran; Chattopadhyay, Goutam
- 印刷ISSN2156-342X
- 电子ISSN2156-3446
- 文件大小878.09KB
- 发表时间2016
- DOI10.1109/tthz.2016.2593793
- 页码1-6