Integrating MTJ Devices into a 130nm CMOS Process Flow

Buchbinder, Miryam; Eli, Ora; Rozental, Sagie; Bouhnik, Yami; Greenberg, Shimon; Mani, Krish; Cohen, Yifat; Mackay, Ken; Pereira, Jeremy; Herault, Jeremy Alvarez

期刊名称Advances in Science and Technology
作者Buchbinder, Miryam; Eli, Ora; Rozental, Sagie; Bouhnik, Yami; Greenberg, Shimon; Mani, Krish; Cohen, Yifat; Mackay, Ken; Pereira, Jeremy; Herault, Jeremy Alvarez
卷第99卷
电子ISSN1662-0356
文件大小3621.13KB
发表时间2016-10
DOI10.4028/www.scientific.net/AST.99.81
页码81-89

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Integrating MTJ Devices into a 130nm CMOS Process Flow