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[NanoScience and Technology] Helium Ion Microscopy || Monte Carlo Simulations of Focused Ion Beam Induced Processing

[NanoScience and Technology] Helium Ion Microscopy || Monte Carlo Simulations of Focused Ion Beam Induced Processing

Hlawacek, Gregor; Gölzhäuser, Armin

作者Hlawacek, Gregor; Gölzhäuser, Armin
文件大小2145.61KB
发表时间2016
DOI10.1007/978-3-319-41990-9_4
页码89-118

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