Effects of Substrate and Post-Growth Treatments on the Microstructure and Properties of ZnO Thin Films Prepared by Atomic Layer Deposition

Haseman, Micah; Saadatkia, P.; Winarski, D. J.; Selim, F. A.; Leedy, K. D.; Tetlak, S.; Look, D. C.; Anwand, W.; Wagner, A.

期刊名称Journal of Electronic Materials
作者Haseman, Micah; Saadatkia, P.; Winarski, D. J.; Selim, F. A.; Leedy, K. D.; Tetlak, S.; Look, D. C.; Anwand, W.; Wagner, A.
卷第45卷
期第12期
印刷ISSN0361-5235
电子ISSN1543-186X
文件大小2235.40KB
发表时间2016-12
DOI10.1007/s11664-016-5025-0
页码6337-6345

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