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Improved Tangent Space Based Distance Metric for Lithographic Hotspot Classification

Improved Tangent Space Based Distance Metric for Lithographic Hotspot Classification

Yang, Fan; Sinha, Subarna; Chiang, Charles C.; Zeng, Xuan; Zhou, Dian

期刊名称IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems
作者Yang, Fan; Sinha, Subarna; Chiang, Charles C.; Zeng, Xuan; Zhou, Dian
印刷ISSN0278-0070
电子ISSN1937-4151
文件大小1372.60KB
发表时间2016
DOI10.1109/TCAD.2016.2638440
页码1-1

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