[IEEE 2016 11th International Microsystems, Packaging, Assembly and Circuits Technology Conference (IMPACT) - Taipei, Taiwan (2016.10.26-2016.10.28)] 2016 11th International Microsystems, Packaging, Assembly and Circuits Technology Conference (IMPACT) - Nanomechanical properties and fracture behaviors of GaN and Al0.08 Ga0.92 N thin films deposited on c-plane sapphire by MOCVD
- 作者Yang, P.-F.; Huang, C.-C.; Chen, D.-L.; Lin, T.-C.; Tsai, Y.-H.; Jian, S.-R.
- 文件大小1056.54KB
- 发表时间2016
- DOI10.1109/IMPACT.2016.7800022
- 页码349-352
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