Large area fast-AFM scanning with active “Quattro” cantilever arrays

Ahmad, Ahmad; Nikolov, Nikolay; Angelov, Tihomir; Ivanov, Tzvetan; Reum, Alexander; Atanasov, Ivaylo; Guliyev, Elshad; Ishchuk, Valentyn; Kaestner, Marcus; Krivoshapkina, Yana; Lenk, Steve; Lenk, Claudia; Rangelow, Ivo W.; Holz, Mathias

期刊名称Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
作者Ahmad, Ahmad; Nikolov, Nikolay; Angelov, Tihomir; Ivanov, Tzvetan; Reum, Alexander; Atanasov, Ivaylo; Guliyev, Elshad; Ishchuk, Valentyn; Kaestner, Marcus; Krivoshapkina, Yana; Lenk, Steve; Lenk, Claudia; Rangelow, Ivo W.; Holz, Mathias
卷第34卷
期第6期
印刷ISSN2166-2746
电子ISSN2166-2754
文件大小5531.21KB
发表时间2016-11
DOI10.1116/1.4967159

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Large area fast-AFM scanning with active “Quattro” cantilever arrays