Scatterometry for nanoimprint lithography

• 期刊名称Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
• 作者Zhu, Ruichao; Brueck, Steven R. J.; Dawson, Noel; Busani, Tito; Joseph, Praveen; Singhal, Shrawan; Sreenivasan, S. V.
• 卷第34卷
• 期第6期
• 印刷ISSN2166-2746
• 电子ISSN2166-2754
• 文件大小3076.86KB
• 发表时间2016-11
• DOI10.1116/1.4967933