Reliability testing of Ni-Fe as structural material in MEMS gyroscope
- 期刊名称Journal of Micro/Nanolithography, MEMS, and MOEMS
- 作者Jain, Ankush; Gopal, Ram
- 卷第15卷
- 期第4期
- 印刷ISSN1932-5150
- 文件大小2080.58KB
- 发表时间2016-12-30
- DOI10.1117/1.JMM.15.4.040501
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