[IEEE 2016 14th International Baltic Conference on Atomic Layer Deposition (BALD) - St. Petersburg, Russia (2016.10.2-2016.10.4)] 2016 14th International Baltic Conference on Atomic Layer Deposition (BALD) - Software tools for profile analysis of multi-layered systems by using the Elastic Peak Electron Spectroscopy
- 作者Afanas'ev, Victor P.; Gryazev, Alexander S.; Kaplya, Pavel S.; Efremenko, Dmitry S.; Ridzel, Olga Yu.
- 文件大小362.00KB
- 发表时间2016
- DOI10.1109/BALD.2016.7886531
- 页码34-37
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