![MOEMS transducer with a non-linear transfer characteristic for static displacement measurement applications on the example of an inclination sensor]()
MOEMS transducer with a non-linear transfer characteristic for static displacement measurement applications on the example of an inclination sensorSteiner, H.; Hortschitz, W.; Kainz, A.; Stifter, M.; Jachimowicz, A.; Schalko, J.; Keplinger, F.; Kohl, F. · Sensors and Actuators A: Physical · 2017