Low-temperature synthesis of carbon nitride by microwave plasma CVD
- 期刊名称Japanese Journal of Applied Physics
- 作者Tanaka, Ippei; Sakamoto, Yukihiro
- 卷第55卷
- 印刷ISSN0021-4922
- 电子ISSN1347-4065
- 文件大小1167.38KB
- 发表时间2016-01-01
- DOI10.7567/JJAP.55.01AA15
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