Slope and amplitude asymmetry effects on low frequency capacitively coupled carbon tetrafluoride plasmas

Bruneau, B.; Korolov, I.; Lafleur, T.; Gans, T.; O'Connell, D.; Greb, A.; Derzsi, A.; Donkó, Z.; Brandt, S.; Schüngel, E.; Schulze, J.; Johnson, E.; Booth, J.-P.

期刊名称Journal of Applied Physics
作者Bruneau, B.; Korolov, I.; Lafleur, T.; Gans, T.; O'Connell, D.; Greb, A.; Derzsi, A.; Donkó, Z.; Brandt, S.; Schüngel, E.; Schulze, J.; Johnson, E.; Booth, J.-P.
卷第119卷
期第16期
印刷ISSN0021-8979
电子ISSN1089-7550
文件大小2434.88KB
发表时间2016-04-28
DOI10.1063/1.4947453

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Slope and amplitude asymmetry effects on low frequency capacitively coupled carbon tetrafluoride plasmas