![Diagnosis of phosphorus monolayer doping in silicon based on nanowire electrical characterisation]()
Diagnosis of phosphorus monolayer doping in silicon based on nanowire electrical characterisationDuffy, Ray; Ricchio, Alessio; Murphy, Ruaidhrí; Maxwell, Graeme; Murphy, Richard; Piaszenski, Guido; Petkov, Nikolay; Hydes, Alan; O'Connell, Dan; Lyons, Colin; Kennedy, Noel; Sheehan, Brendan; Schmidt, Michael; Crupi, Felice; Holmes, Justin D.; Hurley, Paul K.; Connolly, James; Hatem, Chris; Long, Brenda · Journal of Applied Physics · 2018