Intrinsic stress evolution during different growth stages of diamond film
- 期刊名称Diamond and Related Materials
- 作者Hua, Chenyi; Yan, Xiongbo; Wei, Junjun; Guo, Jianchao; Liu, Jinlong; Chen, Liangxian; Hei, Lifu; Li, Chengming
- 卷第73卷
- 印刷ISSN0925-9635
- 文件大小852.88KB
- 发表时间2017-03
- DOI10.1016/j.diamond.2016.12.008
- 页码62-66
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