发现好书期刊，享受阅读乐趣

海量图书期刊资源，随时随地畅享阅读乐趣

$Subdiffraction plasmonic lens lithography prototype in stepper mode$

Subdiffraction plasmonic lens lithography prototype in stepper mode

Liu, Minggang; Zhao, Chengwei; Luo, Yunfei; Zhao, Zeyu; Wang, Yanqin; Gao, Ping; Wang, Changtao; Luo, Xiangang

期刊名称Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
作者Liu, Minggang; Zhao, Chengwei; Luo, Yunfei; Zhao, Zeyu; Wang, Yanqin; Gao, Ping; Wang, Changtao; Luo, Xiangang
卷第35卷
期第1期
印刷ISSN2166-2746
电子ISSN2166-2754
文件大小3977.60KB
发表时间2017-01
DOI10.1116/1.4972521

← 返回【学霸图书馆】主页