Closed-form modelling and design analysis of V- and Z-shaped electrothermal microactuators
Zhang, Zhuo; Zhang, Weize; Wu, Qiyang; Yu, Yueqing; Liu, Xinyu; Zhang, Xuping
- 期刊名称Journal of Micromechanics and Microengineering
- 作者Zhang, Zhuo; Zhang, Weize; Wu, Qiyang; Yu, Yueqing; Liu, Xinyu; Zhang, Xuping
- 卷第27卷
- 期第1期
- 印刷ISSN0960-1317
- 电子ISSN1361-6439
- 文件大小3123.68KB
- 发表时间2017-01-01
- DOI10.1088/1361-6439/27/1/015023