Ultraprecision surface flattening of porous silicon by diamond turning
- 期刊名称Precision Engineering
- 作者Heidari, Mehdi; Yan, Jiwang
- 印刷ISSN0141-6359
- 文件大小3137.78KB
- 发表时间2017-3
- DOI10.1016/j.precisioneng.2017.02.015
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