SPIE Proceedings [SPIE SPIE LASE - San Francisco, California, United States (Saturday 28 January 2017)] Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXII - Ultrafast laser energy deposition in copper revealed by simulation and experimental determination of optical constants with pump-probe ellipsometry
- 作者Neuenschwander, Beat; Grigoropoulos, Costas P.; Makimura, Tetsuya; Račiukaitis, Gediminas; Winter, Jan; Rapp, Stephan; Schmidt, Michael; Huber, Heinz P.
- 卷第10091卷
- 印刷ISSN0277-786X
- 文件大小1142.93KB
- 发表时间2017
- DOI10.1117/12.2255946
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