High-resolution non-destructive three-dimensional imaging of integrated circuits

• 期刊名称Nature
• 作者Holler, Mirko; Guizar-Sicairos, Manuel; Tsai, Esther H. R.; Dinapoli, Roberto; Müller, Elisabeth; Bunk, Oliver; Raabe, Jörg; Aeppli, Gabriel
• 卷第543卷
• 期第7645期
• 印刷ISSN0028-0836
• 电子ISSN1476-4687
• 文件大小7737.43KB
• 发表时间2017-3-15
• DOI10.1038/nature21698
• 页码402-406