H-ion Irradiation-induced Annealing in He-ion Implanted 4H-SiC

Han, Yi; Li, Bing-Sheng; Wang, Zhi-Guang; Peng, Jin-Xin; Sun, Jian-Rong; Wei, Kong-Fang; Yao, Cun-Feng; Gao, Ning; Gao, Xing; Pang, Li-Long; Zhu, Ya-Bin; Shen, Tie-Long; Chang, Hai-Long; Cui, Ming-Huan; Luo, Peng; Sheng, Yan-Bin; Zhang, Hong-Peng; Fang, Xue-Song; Zhao, Si-Xiang; Jin, Jin; Huang, Yu-Xuan; Liu, Chao; Wang, Dong; He, Wen-Hao; Deng, Tian-Yu; Tai, Peng-Fei; Ma, Zhi-Wei

期刊名称Chinese Physics Letters
作者Han, Yi; Li, Bing-Sheng; Wang, Zhi-Guang; Peng, Jin-Xin; Sun, Jian-Rong; Wei, Kong-Fang; Yao, Cun-Feng; Gao, Ning; Gao, Xing; Pang, Li-Long; Zhu, Ya-Bin; Shen, Tie-Long; Chang, Hai-Long; Cui, Ming-Huan; Luo, Peng; Sheng, Yan-Bin; Zhang, Hong-Peng; Fang, Xue-Song; Zhao, Si-Xiang; Jin, Jin; Huang, Yu-Xuan; Liu, Chao; Wang, Dong; He, Wen-Hao; Deng, Tian-Yu; Tai, Peng-Fei; Ma, Zhi-Wei
卷第34卷
期第1期
印刷ISSN0256-307X
电子ISSN1741-3540
文件大小622.09KB
发表时间2017-01
DOI10.1088/0256-307X/34/1/012801

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H-ion Irradiation-induced Annealing in He-ion Implanted 4H-SiC