Scanning probe-based high-accuracy overlay alignment concept for lithography applications

Ishchuk, Valentyn; Guliyev, Elshad; Aydogan, Cemal; Buliev, Ivan; Kaestner, Marcus; Ivanov, Tzvetan; Ahmad, Ahmad; Reum, Alexander; Lenk, Steve; Lenk, Claudia; Nikolov, Nikolay; Glinsner, Thomas; Rangelow, Ivo W.

期刊名称Applied Physics A
作者Ishchuk, Valentyn; Guliyev, Elshad; Aydogan, Cemal; Buliev, Ivan; Kaestner, Marcus; Ivanov, Tzvetan; Ahmad, Ahmad; Reum, Alexander; Lenk, Steve; Lenk, Claudia; Nikolov, Nikolay; Glinsner, Thomas; Rangelow, Ivo W.
卷第123卷
期第1期
印刷ISSN0947-8396
电子ISSN1432-0630
文件大小10287.16KB
发表时间2017-1
DOI10.1007/s00339-016-0681-8

发现好书期刊，享受阅读乐趣

Scanning probe-based high-accuracy overlay alignment concept for lithography applications